Optical waveguide and manufacturing method therefor



<P>PROBLEM TO BE SOLVED: To provide an optical waveguide which can easily be manufactured by a duplication method, and moreover has a structure resistant to leaking of an internal optical signal from the core, and to provide a manufacturing method therefor. <P>SOLUTION: A clad substrate 2 is provided with a recessed groove 3 for forming a core on the upper surface. Also, on both sides of the recessed groove 3, recession parts 6 are formed via flat parts 5. After applying an ultraviolet curing transparent resin 8 onto this clad substrate 2, the transparent resin 8 is pressed by a stamper 13. Then, since the core 4 is formed in the recessed groove 3 and also excessive amount of the transparent resin 8 pressed between the stamper 13 and the flat part 5 can flow and escape into the recession 6 sides, the transparent resin 8 can be thinned in a short period of time. Thus, the transparent resin 8 remaining on the flat parts 5 has thickness of 3μm or less and has a width of 5μm to 5mm. <P>COPYRIGHT: (C)2004,JPO&NCIPI
【課題】 複製法によって容易に製作でき、しかも、内部の光信号がコア内から漏れにくい構造を有する光導波路とその製造方法を提供する。 【解決手段】 クラッド基板2の上面には、コアを形成するための凹溝3が設けられている。また、凹溝3の両側には、平坦部5を介して窪み6が形成されている。このクラッド基板2の上に紫外線硬化型の透明樹脂8を塗布した後、透明樹脂8をスタンパ13で押さえ付ける。このとき、凹溝3内にコア4が成形されると共にスタンパ13と平坦部5との間で押圧された余分な透明樹脂8は窪み6側へ流動して逃げることができるので、短時間のうちに透明樹脂8を薄くできる。こうして、平坦部5の上に残っている透明樹脂8は、コア4から光が極めて漏れにくい3μm以下の厚みと、5μm以上5mm以下の幅になる。 【選択図】 図4




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    JP-2007305895-ANovember 22, 2007Apic Yamada Corp, アピックヤマダ株式会社Imprinting method, and nano-imprinting apparatus
    KR-101160774-B1June 28, 2012중앙대학교 산학협력단슬롯 웨이브 가이드를 이용한 링 공진기, 이를 구비한 링 공진기 센서 및 이러한 링 공진기 센서를 포함한 마이크로 공진기 센서 장치