光透過膜とその製造方法

Light transmission film and its manufacturing method

Abstract

【課題】機械的強度・耐久性に優れた、水素の吸収・放出により光の透過率が変化する光透過膜とその製造方法を提供する。 【解決手段】透明基板と、透明基板上に形成された希土類金属薄膜と、希土類金属薄膜上に保護層として形成されたAlN x (0.5≦x≦0.9)とPdの混合膜とを有する光透過膜とする。 【選択図】 図2
PROBLEM TO BE SOLVED: To provide a light transmission film which is excellent in mechanical strength and durability and whose transmissivity of light is changed by absorption/emission of hydrogen. SOLUTION: This light transmission film has transparent substrate, a rare earth metallic thin film formed on the transparent substrate and a mixed film of AlN x (0.5≤x≤0.9) and Pd formed on the rare earth metallic thin film as a protective layer and the film is excellent in mechanical strength and durability and whose transmissivity of light is changed by the absorption/emission of hydrogen, and its manufacturing method is also provided. The film can be applied to a window which changes to a mirror and a hydrogen sensor which senses hydrogen concentration of environment, etc. COPYRIGHT: (C)2005,JPO&NCIPI

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    JP-2008532211-AAugust 14, 2008サン−ゴバン グラス フランス平らなまたは実質的に平らな発光構造