セラミックヒータ

Ceramic heater

Abstract

<P>PROBLEM TO BE SOLVED: To provide a ceramic heater in which a difference of thermal expansion coefficients of a heater member and an exothermic body is made small, and cracks or breakage of the heater member is suppressed. <P>SOLUTION: In the ceramic heater 1 in which an exothermic body of which main components are silicide of Mo or W, nitride, and carbide is embedded into the heater member 21, the heater member 21 has silicon nitride as the main component and it contains rare earth elements, Cr compound, and a compound composed of 5-10 vol% of Cr and W of which particle diameters are less than 3 μm. <P>COPYRIGHT: (C)2005,JPO&NCIPI
【課題】ヒータ部材と発熱体との熱膨張係数の差を小さくし、ヒータ部材の亀裂や折損を抑制するセラミックヒータを提供することを目的とする。 【解決手段】ヒータ部材21に、MoまたはWの珪化物、窒化物、炭化物を主成分とする発熱体を埋設してなるセラミックヒータ1において、ヒータ部材21は、窒化珪素を主成分とし、希土類元素と、Cr化合物と、粒径が3μm未満で5〜10vol%のCrとWとからなる化合物と、を含有する。 【選択図】 図1

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Cited By (7)

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    CN-104145528-ANovember 12, 2014京瓷株式会社Heater and glow plug equipped with heater
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    JP-2008288110-ANovember 27, 2008Ngk Spark Plug Co Ltd, 日本特殊陶業株式会社セラミックヒータ
    JP-WO2013129597-A1July 30, 2015京セラ株式会社ヒータおよびこれを備えたグロープラグ
    US-8227726-B2July 24, 2012Ngk Spark Plug Co., Ltd.Ceramic heater and glow plug
    US-9689570-B2June 27, 2017Kyocera CorporationHeater and glow plug with the same
    WO-2013129597-A1September 06, 2013京セラ株式会社ヒータおよびこれを備えたグロープラグ